Titanium carbo-nitride (TiCN) comes under the metal nitride group which can provide a combined property of titanium carbide (TiC) and titanium nitride (TiN) coating. TiCN Coating possess an excellent mechanical and tribological, properties which leads its application in many industries particularly in the Automotive and aerospace industries. TiCN films can be very hard and strong based on the composition and synthesis process. Physical Vapor Deposition (PVD) technique is widely used for the preparation of thin film coating because of its ability to precisely control the composition and thickness of the coatings. The properties of the developed coating significantly affect by the PVD process parameters and their levels. Multi-Criteria Decision Making (MCDM) methods are widely used in many sectors for the selection of process parameters based upon some specific criteria. In the present work TiCN coatings were synthesized by using one of the most widely used PVD method called magnetron sputtering. L16 orthogonal array was used as a design of experiment for the experimental work by varying the sputtering process parameters like bias voltage, N2 flow rate and substrate to target distance. After the synthesis, the developed films were tested using atomic force microscopy (AFM), Scanning electron microscopy (SEM), and Nanoindentation. From the characterization three response parameters such as hardness (H), Modulus of elasticity (E) and surface roughness (Ra) of the coating has been considered. A hybrid method based on improved removal effects of criteria- technique for order performance by similarity to ideal solution (MEREC-TOPSIS) approach has been considered for the for the process parameters selection. The results have also been compared with other weight calculation techniques. In all the cases it is observed that experiment no 16 and 15 have got the 1st and second rank respectively. However, experiment no 1 is the last rank in all the cases. From the correlation analysis it is found a strong positive correlation between MEREC-TOPSIS and other methods. The method provides a significant advancement in the selection of optimal parameters, ensuring enhanced coating properties crucial for industrial applications.
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